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| The NanoManipulator |
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The extremely compact Nanomanipulator consists of the Tilting Table and a central Nanomotor® for z movement (pointing upwards of downwards). The tip can be positioned in a range of 5mm x 5mm x 15mm (z). Versions with different size and strength are also available. The resolution is in the sub-nanometer range.
A further advantage of this arrangement is its thermal compensation, when the central Nanomotor points downward. This is also an advantage as compared with others kinds of tilting manipulators.
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| The mini XYZ NanoManipulator |
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| The NanoRobotic Manipulator |
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Three NMT modules form a manipulator with sub-10 nm resolution, a perfect device as a tool in SEMs, FIBs, and FESEMs.
The NMT modules are driven by the Nanomotor®. Loads of up to 2 kg can be moved over centimeters of stroke with down to 2 nm resolution. Manipulation in many degrees of freedom is possible without backlash. All NMT modules can easily be fixed onto each other. Very small connectors allow the exchange of a module without removing cables.
NanoGrippers and Force Sensors can easily be fixed on these modules. |
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