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NMT NanoPositioning Stages |
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- 2 nm resolution
- repeatability better than 10 nm
- 5 - 70 mm stroke
- maximum load up to 2000 g
- small dimensions
- modular system with easy handling
- vacuum compatible
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Datasheet |
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Type |
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Stroke |
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Max Load |
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Length in Direction of Stroke |
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Space necessary in direction of stroke |
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Max Width |
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Height |
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NMT 10-L |
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10 mm |
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0.2 kg |
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50 mm |
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0.2 kg |
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17 mm |
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13 mm |
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NMT 20-L |
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20 mm |
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0.2 kg |
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60 mm |
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0.2 kg |
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17 mm |
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13 mm |
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NMT 10 |
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10 mm |
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1 lg |
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40 mm |
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1 lg |
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26 mm |
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13 mm |
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NMT 20 |
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20 mm |
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1 kg |
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50 mm |
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1 kg |
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26 mm |
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13 mm |
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NMT 30 |
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30 mm |
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2 kg |
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60 mm |
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2 kg |
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29 mm |
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13 mm |
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NMT 50 |
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50 mm |
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2 kg |
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80 mm |
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2 kg |
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34 mm |
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13 mm |
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NMT 60 |
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60 mm |
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2 kg |
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90mm |
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2 kg |
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34 mm |
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13 mm |
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NMT 70 |
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70 mm |
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2 kg |
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100 mm |
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2 kg |
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34 mm |
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13 mm |
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A new set of motorized stages developed by Klocke Nanotechnik allow high strokes at small volumes. The modules are driven with the smallest and most precise linear motor, the Nanomotor. Loads of up to 2 kg can be moved over centimeters of stroke with down to 2 nm resolution. Manipulation in many degrees of freedom is possible without backlash. The modules NMT xx-L are longer, but thin like a pencil. In most of the NMT modules position measurement systems can be included without increasing the size. The resolution of the poition sensor is better than 10 nm. |
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